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E. Scheid
Affiliation : Centre National de la Recherche Scientifique · Laboratoire d'Analyse et d'Architecture des Systèmes · Université de Toulouse
- 7Publications (affiliation in France)
- 189Total publications
- 1800Citations
- 23h-index
Research profile
E. Scheid has 7 indexed publications (1997–2011). Their work appears mainly in “International Conference on Electrical and Electronics Engineering”, “Materials Science in Semiconductor Processing” and “Spectroscopy Letters”. Their most cited article, “Boron Diffusion and Activation during Heat Treatment in Heavily Doped Polysilicon Thin Films for P+ Metal-Oxide-Semiconductor Transistors Ga” (2001), has been cited 24 times. 3 of these publications date from the last three years of activity. Their work is co-authored with at least 5 researchers, including institutions in Japan.
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Create my free profile Add my publicationsResearch areas
- Semiconductor materials and devices
- Semiconductor materials and interfaces
- Silicon and Solar Cell Technologies
- Copper Interconnects and Reliability
- Advanced Materials and Semiconductor Technologies
Publications (7)
- Influence of the annealing condition on the BN bonds intensity detected by FTIR characterization
- Nitrogen doped silicon films heavily boron implanted for MOS structures: Simulation and characterization
- Physicochemical Characterization of Annealed PolySi/NIDOS/SiO2 Structures
- Boron diffusion and activation in polysilicon multilayer films for P+ MOS structure: Characterization and modeling
- A Monte Carlo simulation study of boron profiles as-implanted into LPCVD–NiDoS polycrystalline thin films
- Boron Diffusion and Activation during Heat Treatment in Heavily Doped Polysilicon Thin Films for P+ Metal-Oxide-Semiconductor Transistors Gates
- Electrical characteristics of thin silica layers nitrided by LPCVD nitrogen doped silicon
Publication venues
- International Conference on Electrical and Electronics Engineering × 1
- Materials Science in Semiconductor Processing × 1
- Spectroscopy Letters × 1
- Microelectronics Journal × 1
- Solid State Communications × 1
- Japanese Journal of Applied Physics × 1
Publications per year
- 20111
- 20101
- 20091
- 20081
- 20031
- 20011
- 19971
Collaborations
Partner institutions : Laboratory for Integrated Micro-Mechatronic Systems · The University of Tokyo · Université Toulouse III - Paul Sabatier
Co-authors’ countries : Japan
Co-authors
Bibliographic data from OpenAlex (open database).
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